자유로운 사고로 합리적 판단과 사회적 책임을 다하는 기업
Boat/Tube/Cap/Ring/Electrode
PEC(Dummy Wafer)/Tray
Boat/Tube/Cap/Ring/Electrode
Road/Plate/Ring
| Silicon | Quartz | SiC | |
|---|---|---|---|
| Devitrification | No | Yes | No |
| 1200 to 1300℃ | Stable | Plastic, Warps | Stable |
| Coefficient of thermal Expansion | Similar to wafer | ~5 Times less | ~1.85 Times more |
| Thermal conductivity(1000℃) | Similar to wafer | ~10 times higher | ~10% less |
| Estimated costs of ownership(anno) | 100% | ~380% | ~195% |
| Slip at 1200℃ | None | N.A. | Yes |
| Purity | 0.35 | 4.1 | 1.45 |
| CVD SiC | Hot Pressed SiC | Reaction Bonded SiC | Sintered SiC | Quartz | Poly Silicon | |
|---|---|---|---|---|---|---|
| Purity(%) | > 99.9995 | 97~99.9 | > 99 | 99 | > 99.98 | > 99.999 |
| Density (g/㎤) |
3.21 | 3.15~3.20 | 3.00~3.15 | 3.15 | 2.2 | 2.3 |
| Porosity | negligible | < 1% | < 1% | < 1~2% | < 1% | negligible |
| Thermal Conductivity (W/mK) |
250~300 | 100~180 | 100~150 | 100~140 | 1.4~2.5 | 150 |
| Flexural Strength(MPa) |
590 | 440 | 150 | 350 | 104 | |
| Elastic Modulus(106psi) |
65 | 65 | 65 | 60 | 10 | 16 |
| CTE(RT to 1000℃(1/Kr10-8)) |
4.0 | 4.5 | 4.5 | 4.0 | 0.5 | 3.8 |